Mass Flow Meter

- Laminar DP Mass Flow Meters M Series
- High Performance, Versatile Flow Meters

- Coriolis Mass Flow Meters CODA™ K Series
- Gas Independent Coriolis flow Meters

- MEMS-Thermal Compact Mass Flow Meters
- BASIS™ B Series
Ultra Compact for OEM applications

- 0.5 SCCM – 12,000 SLPM options
- 11.5 – 160 PSIA operating
- Accuracy as good as ± 0.5% of reading
- ± (0.1% of reading + 0.02% of full scale) repeatability

- 10 SCCM – 12,000 SLPM options
- 11.5 – 320 PSIA operating
- Accuracy as good as ± 0.6% of reading or ±0.1% of full scale, whichever is greater
- ± 0.1% of full scale repeatability

- Also uses laminar differential pressure mass flow meter
- Robust, compliant materials including USP Class VI or USPVI elastomers
- Designed for scalability (10,000:1 operating range)